Apparatus and system for generating extreme ultraviolet light and method of using the same

An apparatus for generating extreme ultraviolet light, the apparatus comprising:

• a collector mirror unit;
• a gas supply unit configured to supply a processing gas to the collector mirror unit;
• a peripheral gas supply nozzle arranged at a peripheral area of the collector mirror unit and configured to supply the processing gas inwardly along a surface of the collector mirror unit to remove contamination from the surface of the collector mirror unit;
• a sensing unit configured to measure a contamination level of the surface of the collector mirror unit;
• and
• a controller configured to adjust a shape of a spray hole of the peripheral gas supply nozzle in response to the measured contamination level.

An apparatus for generating extreme ultraviolet light, the apparatus comprising:

• a vessel;
• a light source configured to supply a source light to an inside of the vessel;
• a droplet generation unit configured to supply a droplet to the source light which is provided to the inside of the vessel;
• a collector mirror unit arranged within the vessel and configured to collect and reflect extreme ultraviolet light which is generated by reaction between the source light and the droplet;
• a gas supply unit configured to supply processing gas to the collector mirror unit;
• a first gas supply nozzle arranged in a peripheral area of the collector mirror unit and supply the processing gas toward a center area of the collector mirror unit to remove contamination from a surface of the collector mirror unit;
• a second gas supply nozzle arranged in the center area of the collector mirror unit and configured to supply the processing gas therethrough;
• a sensing unit configured to measure a contamination level of the surface of the collector mirror unit;
• and
• a controller configured to adjust a shape of at least one of a first spray hole of the first gas supply nozzle and a second spray hole of the second gas supply nozzle, wherein the controller adjusts the shape of at least one of the first and second spray holes responsive to a result of measuring the contamination level by the sensing unit.