Apparatus for and method of supplying target material
AssigneeASML Netherlands B.V.
InventorsChirag Rajyaguru, John M. Algots, Tetsuya Ishikawa, Peter Baumgart
Life of this patent
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Abstract
An EUV light source target material handling system is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating.
Claims20
Apparatus for supplying target material to a system for generating EUV radiation by creating a plasma from molten target material at a plasma site, the apparatus comprising:
- a target material repository comprising
- a chamber for receiving target material in solid form, and
- an induction heater in electromagnetic communication with an interior of the chamber and arranged to heat target material in the chamber by electromagnetic induction and convert target material in the chamber in solid form to target material in liquid form;
- and
- a target material dispenser releasably connected to the target material repository and arranged to receive target material in liquid form from the target material repository and to dispense the target material in liquid form to the plasma site.
Apparatus for supplying target material to a system for generating EUV radiation by creating a plasma from molten target material at a plasma site, the apparatus comprising:
- a target material repository comprising
- a ceramic housing comprising a chamber for receiving target material in solid form through an insertion port in the ceramic housing,
- a coil in electromagnetic communication with the chamber and arranged to heat target material in the chamber by electromagnetic induction and convert target material in solid form in the chamber to target material in liquid form;
- and
- an outlet port in the ceramic housing for permitting melted target material to flow from the chamber,
- the ceramic housing also including an inlet port to permit introduction of a buffer gas into the chamber;
- and
- a coupler for releasably coupling the target material repository to a target material dispenser.
Apparatus for supplying target material to a system for generating EUV radiation by creating a plasma from molten target material at a plasma site, the apparatus comprising:
- a target material loader including a target material repository adapted to receive bars of target material in solid form, the target material repository comprising:
- a chamber for receiving the bars of target material in solid form;
- an induction heater in electromagnetic communication with the chamber and arranged to heat target material in the chamber by electromagnetic induction and convert target material in solid form in the chamber to target material in liquid form;
- the target material loader being adapted to be handheld;
- a target material dispenser arranged to dispense the target material in liquid form to the plasma site;
- and
- a coupler for releasably coupling the target material loader to the target material dispenser for loading the target material with target material in liquid form.
Apparatus for supplying target material to a system for generating EUV radiation by creating a plasma from molten target material at a plasma site, the apparatus comprising:
- a target material loader including a target material repository adapted to receive a wire comprising target material in solid form, the target material repository comprising
- a chamber for receiving the wire,
- an induction heater in electromagnetic communication with an interior of the chamber and arranged to heat the wire in the chamber by electromagnetic induction and convert target material in the wire in the chamber to target material in liquid form;
- and
- a coupler for releasably coupling the target material repository to a target material dispenser.
A method of supplying target material to a system for generating EUV radiation by creating a plasma from a molten target material at a plasma site, the method comprising:
- adding the target material in solid form to a target material repository;
- inductively heating the target material in solid form in the target material repository to heat the target material in the target material repository chamber by electromagnetic induction and convert the target material in solid form in the target material repository to target material in liquid form;
- releasably coupling the target material repository to a target material dispenser to supply the target material in liquid form to the target material dispenser;
- and
- disconnecting the target material depository from the target material dispenser when supplying the target material in liquid form to the target material dispenser is not required.
Dependencies are inferred from the claim text.