Nozzle
AssigneeASML Netherlands B.V.
InventorsJian Zhao, Tetsuya Ishikawa
Life of this patent
Estimating the term…
Abstract
An EUV light source target material handling system is disclosed which includes a target material dispenser and a target material repository including a nozzle with a radial trench design. The nozzle may be formed from a silicon-on-insulator wafer.
Claims19
A nozzle comprising an inlet and an outlet in fluid communication with the inlet, the outlet being formed of an orifice through a substrate and a structure defining a plurality of trenches positioned around the orifice, each of the trenches being formed on the substrate, and having a length extending generally radially with respect to a central portion of the orifice, wherein the nozzle is a multilayer structure having a first layer and a second layer on the first layer, where at least part of the inlet is formed in the first layer and at least part of the outlet is formed in the second layer.
A nozzle comprising:
- an inlet;
- and
- an outlet in fluid communication with the inlet, the outlet being formed of an orifice and a plurality of trenches circumferentially spaced around the orifice and formed on a common substrate and having a length extending radially with respect to a central portion of the orifice, wherein the nozzle is a multilayer structure having a first layer and a second layer on the first layer, where at least part of the inlet is formed in the first layer and at least part of the outlet is formed in the second layer.
A multilayer nozzle structure comprising:
- a first layer comprising structure formed from the first layer defining an inlet;
- and
- a second layer on the first layer, the second layer comprising structure formed from the second layer defining a nozzle orifice aligned with the inlet, the nozzle orifice being in the form of a plurality trenches having a length extending radially with respect to a central portion of the nozzle orifice.
A multilayer nozzle structure formed of an SOI substrate, the SOI substrate comprising a device layer, an insulating layer, and a handle layer, the nozzle comprising:
- an inlet formed in the handle layer;
- and
- a nozzle orifice formed in the device layer and aligned with the inlet, the nozzle orifice being in the form of a plurality trenches having a length extending radially with respect to a central portion of the nozzle orifice.
A nozzle comprising an inlet and an outlet in fluid communication with the inlet, the outlet being formed of an orifice through a substrate and a ring of circumferentially spaced wedge-shaped elements defining between pairs of the wedge shaped elements a respective one of a plurality of trenches positioned around the orifice, each of the trenches being formed on the substrate, and having a length extending generally radially with respect to a central portion of the orifice, wherein the nozzle is a multilayer structure having a first layer and a second layer on the first layer, where at least part of the inlet is formed in the first layer and at least part of the outlet is formed in the second layer.
Dependencies are inferred from the claim text.