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US 9,543,922 B2Granted
Mesa-shaped piezoelectric resonator element
AssigneeSeiko Epson Corporation
InventorsMatsutaro Naito, Yoshiyuki Aoshima
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Abstract
A mesa-shaped piezoelectric resonator element including a resonator section having a thicker thickness than a peripheral section on the board surface of a piezoelectric substrate formed in a rectangular shape, wherein, when the length of the long side of the piezoelectric substrate is x and the board thickness of the resonator section is t, etching depth y of a level-difference section is set to fulfill a relationship in the following equation, based on the board thickness t. y = - 1.32 × ( x t ) + 43 ± 5 ( % )
Claims12
A resonator element, comprising:
- a resonator section having a thickness that is greater than a thickness of a peripheral section on a board surface of a substrate formed in a rectangular shape, the peripheral section having a fixed position, wherein the resonator section resonates with thickness shear vibration,
- when the length of the long side of the substrate is x and the board thickness of the resonator section is t, y being set to fulfill a relationship in the following equation, based on the board thickness t,
- y
- =
- -
- 1.32
- ×
- (
- x
- t
- )
- +
- 43
- ±
- 5
-
- (
- %
- )
- ,
- y being a percentage value of a difference between the board thickness t and the thickness of the peripheral section over the board thickness t, and
- the resonator section comprising a level-difference section, the level-difference section being adjacent to the peripheral section and having a level-difference plane,
- wherein the level-difference section is positioned at a maximum amplitude of a flexural mode occurring along a displacement direction of the thickness shear vibration in the substrate.
20 more elements
Dependencies are inferred from the claim text.