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US 9,543,627 B2Granted
Microwave device using magnetic material nano wire array and manufacturing method thereof
AssigneeElectronics and Telecommunications Research Institute
InventorsYark Yeon Kim, Han Young Yu, Yong Sun Yoon, Won Ick Jang
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Abstract
Provided herein is a microwave device using a magnetic material nano wire array and a manufacturing method thereof, the device including a template having a nano hole array filled with a metal magnetic material.
Claims14
A microwave device having a magnetic material nano wire array, the device comprising:
- a template having an array of nano holes, each of the nano holes extending from a first surface of the template to a second surface of the template opposite the first surface,
- wherein the nano holes are filled with a metal magnetic material to form an array of magnetic material nano wires, at least one end of each of the magnetic material nano wires extending to the second surface of the template;
- and
- a magnetic material layer formed on the second surface of the template and that is in contact with the ends of the magnetic material nano wires that extends to the second surface of the template.
1 more element
A method for manufacturing a microwave device having a magnetic material nano wire array, the method comprising:
- forming a template having an array of nano holes, each of the nano holes extending from a first surface of the template to a second surface of the template opposite the first surface;
- filling the nano holes with a metal magnetic material to form an array of magnetic material nano wires, at least one end of each magnetic material nano wire extending to the second surface of the template;
- and
- forming a magnetic material layer on the second surface of the template and on the ends of the nano wires that extends to the second surface of the template.
1 more element
Dependencies are inferred from the claim text.