OLED device and manufacturing method thereof and display apparatus
AssigneeBoe Technology Group Co., Ltd.
InventorWenyu Ma
Life of this patent
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Abstract
An OLED device and a manufacturing method thereof and a display apparatus are provided. The OLED device comprises: a substrate, and a first electrode, an organic material function layer and a second electrode which are sequentially provided on the substrate. The OLED device further comprises an uneven layer provided between the first electrode and the substrate, and a surface of the uneven layer corresponding to the first electrode and away from the substrate is not even. The first electrode and/or the second electrode provided on a light output side of the OLED device comprise(s) a metal layer.
Claims8
An OLED device, comprising a substrate, and a first electrode, an organic material function layer and a second electrode which are sequentially provided on the substrate, wherein
- the OLED device further comprises an uneven layer provided between the first electrode and the substrate, and a surface of the uneven layer corresponding to the first electrode and away from the substrate is not even;
- the first electrode and/or the second electrode provided on a light output side of the OLED device comprise(s) a metal layer;
- the uneven layer is a photoresist layer doped with small particles;
- the small particles are exposed from a surface of the photoresist layer corresponding to the first electrode and away from the substrate;
- a photoresist partially retained region and a photoresist completely retained region of the photoresist layer are formed by exposing and developing the substrate on which a photoresist thin film is formed with a half or gray tone mask, wherein the photoresist partially retained region corresponds to the first electrode and the small particles in the photoresist partially retained region are exposed, and the photoresist completely retained region corresponds to the other region;
- and
- a particle size of the small particles is less than 10 nm.
A method of manufacturing an OLED device, comprising forming a first electrode, an organic material function layer and a second electrode sequentially on a substrate, wherein
- the method further comprises forming an uneven layer provided between the first electrode and the substrate, and a surface of the uneven layer corresponding to the first electrode and away from the substrate is not even;
- the first electrode and/or the second electrode provided on a light output side of the OLED device comprise(s) a metal layer;
- the uneven layer is a photoresist layer doped with small particles;
- the small articles are exposed from a surface of the photoresist layer corresponding to the first electrode and away from the substrate;
- a formation of the photoresist layer doped with small particles comprises:
- forming a photoresist thin film doped with the small particles on the substrate;
- and
- exposing and developing the substrate on which the photoresist thin film is formed with a half or gray tone mask to form photoresist partially retained region and photoresist completely retained region, wherein the photoresist partially retained region corresponds to the first electrode and the small particles in the photoresist partially retained region are exposed, and the photoresist completely retained region corresponds to the other region, and forming the photoresist layer;
- and
- a particle size of the small particles is less than 10 nm.
Dependencies are inferred from the claim text.