Vertical hall sensors with reduced offset error
AssigneesMelexis Technologies SA, X-Fab Semiconductor Foundries AG
InventorsChristian Schott, Peter Hofmann
Life of this patent
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Abstract
A semiconductor chip for measuring a magnetic field based on the Hall effect. The semiconductor chip comprises an electrically conductive well having a first conductivity type, in a substrate having a second conductivity type. The semiconductor chip comprises at least four well contacts arranged at the surface of the well, and having the first conductivity type. The semiconductor chip comprises a plurality of buffer regions interleaved with the well contacts and having the first conductivity type. The buffer regions are highly conductive and the buffer region dimensions are such that at least part of the current from a well contact transits through one of its neighboring buffer regions.
Claims14
A semiconductor chip for measuring a magnetic field based on the Hall effect, the semiconductor chip comprising:
- an electrically conductive well having a first conductivity type, in a substrate having a second conductivity type,
- at least four well contacts arranged at the surface of the well, and having the first conductivity type,
- a plurality of buffer regions interleaved with the well contacts such that at least one of the buffer regions and the electrically conductive well are located between neighboring well contacts, wherein the buffer regions have the first conductivity type, and
- wherein the buffer regions are highly conductive and wherein the buffer region dimensions are such that at least part of the current from a well contact to another well contact transits through one of its neighboring buffer regions.
A method for manufacturing a semiconductor chip for measuring a magnetic field based on the Hall effect, wherein applying well contacts and applying buffer regions involves the same processing step or processing steps.
Dependencies are inferred from the claim text.