Full color single pixel including doublet or quadruplet Si nanowires for image sensors
AssigneeZena Technologies, Inc.
InventorMunib Wober
Life of this patent
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Abstract
An image sensor comprising a substrate and one or more of pixels thereon. The pixels have subpixels therein comprising nanowires sensitive to light of different color. The nanowires are functional to covert light of the colors they are sensitive to into electrical signals.
Claims19
An image sensor comprising a substrate and one or more of pixels thereon, wherein each of the pixels comprises a first subpixel and a second subpixel;
- the first subpixel comprises a first nanowire;
- the second subpixel comprises a second nanowire;
- the first and second nanowires extend essentially perpendicularly from the substrate, wherein each pixel of the image sensor further comprises one or more photodiodes, wherein the first nanowire and/or the second nanowire has a transistor therein or thereon.
A method of manufacturing an image sensor, comprising dry etching or VLS growth, wherein the image sensor comprises a substrate and one or more of pixels thereon, wherein each of the pixels comprises at a first subpixel and a second subpixel, the first subpixel comprises a first nanowire, the second subpixel comprises a second nanowire, wherein the first and second nanowires extend essentially perpendicularly from the substrate, wherein each pixel of the image sensor further comprises one or more photodiodes, wherein the first nanowire and/or the second nanowire has a transistor therein or thereon.
A method of sensing an image comprises:
- projecting the image onto an image sensor, wherein the image sensor comprises a substrate and one or more of pixels thereon, wherein each of the pixels comprises at a first subpixel and a second subpixel, the first subpixel comprises a first nanowire, the second subpixel comprises a second nanowire, wherein the first and second nanowires extend essentially perpendicularly from the substrate, wherein each pixel of the image sensor further comprises one or more photodiodes;
- detecting the electrical signals from the first nanowire and the second nanowire;
- and calculating a color of each pixel from the electrical signals, wherein the first nanowire and/or the second nanowire has a transistor therein or thereon.
Dependencies are inferred from the claim text.