Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules

A method of fabricating optoelectronic modules, the method comprising:

• supporting a plurality of singulated transmissive substrates in an apparatus comprising a combined replication and vacuum injection tool;
• replicating optical elements onto at least one side of each of the singulated transmissive substrates using an embossing-type replication technique while the singulated transmissive substrates are supported in the apparatus including the combined replication and vacuum injection tool;
• using a vacuum injection technique to form a respective spacer feature on a first side of each of the singulated transmissive substrates and to form wall features separating adjacent ones of the singulated transmissive substrates from one another, while the singulated transmissive substrates are supported in the apparatus including the combined replication and vacuum injection tool;
• removing from the combined replication and vacuum injection tool a structure comprising the transmissive substrates, the optical elements, the spacer features and the wall features;
• and
• attaching the structure to a support substrate on which a plurality of optoelectronic devices are mounted.