Metal oxide TFT device and method for manufacturing the same
AssigneeShenzhen Royole Technologies Co., Ltd.
InventorsPeng Wei, Xiaojun Yu, Zihong Liu
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AssigneeShenzhen Royole Technologies Co., Ltd.
InventorsPeng Wei, Xiaojun Yu, Zihong Liu
Estimating the term…
A method for manufacturing a metal oxide TFT device is provided. The method includes: selecting a substrate and forming a gate electrode on a first side of the substrate; sequentially depositing an insulating layer, a semiconductor layer, and a photoresist layer on the gate electrode; using the gate electrode as a photomask, exposing from a second side of the substrate and reserving the photoresist layer aligning to the gate electrode; depositing an electrode layer on the semiconductor layer and the reserved photoresist layer; stripping the reserved photoresist layer and lifting off the electrode layer stacked on the reserved photoresist layer; etching a part of the reserved electrode layer and the semiconductor layer, and forming a source electrode, a drain electrode, and a semiconductor island. The method realizes a self-alignment using the gate electrode as the photomask when forming the source, drain electrodes and the channel. Therefore, the manufacturing processes become simple and more accurate.
A method for manufacturing a pixel circuit, comprising:
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