Sub word line driver of a semiconductor memory device
AssigneeSK hynix Inc.
InventorHan Kyu Lee
Life of this patent
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Abstract
A sub word line driver of a semiconductor memory device including a sub word line driver is disclosed. The sub word line driver of a semiconductor memory device comprising: a semiconductor substrate including an active region extended in a first direction; a plurality of gate electrodes extended in a second direction perpendicular to the active region; first and second metal contacts formed over the active region between the gate electrodes; a plurality of metal pads coupled to the first metal contacts; and a plurality of metal signal lines coupled to the second metal contacts, extended in the second direction, and bent at specific parts adjacent to the metal pads.
Claims5
A sub word line driver of a semiconductor memory device comprising:
- a semiconductor substrate including a PMOS region and a NMOS region, wherein an active region is formed to extend in a first direction in the PMOS section;
- a first metal contact formed over an edge of the active region;
- a second metal contact formed over a middle of the active region;
- a gate electrode extended in a second direction perpendicular to the first direction, and formed to include a hole through which a part of the active region is exposed;
- a metal pad formed over the first metal contact and coupled to the first metal contact;
- and
- a metal signal line coupled to the second metal contact, extended in the second direction, and bent in the first direction at a specific part adjacent to the metal pad,
- wherein the second metal contact is formed over the exposed active region inside the hole of the gate electrode with a gap between the second metal contact and the Rate electrode,
- wherein the sub word line driver is repeatedly arranged in the first direction, and
- wherein the bent part of the metal signal line of the sub word line driver is arranged to overlap with a first adjacent sub word line driver, and the bent part of the metal signal line of a second adjacent sub word line driver is arranged to overlap with the sub word line driver such that an upper portion of the gap in the first direction has substantially a same size as a lower portion of the gap in the first direction.
Dependencies are inferred from the claim text.