Forming IV fins and III-V fins on insulator

Abstract

A semiconductor structure including: a set of first fins in a pFET region and a set of second fins in an nFET region, the first fins and the second fins are on a buried insulator layer, the first fins have a bottom surface coplanar with a bottom surface of the second fins, the first fins have a first pitch between adjacent first fins that is equal to a second pitch between adjacent second fins, the first fins include a group IV semiconductor material, the second fins include a group III-V semiconductor material.

Dependencies are inferred from the claim text.