Manufacturing method of semiconductor device

A manufacturing method of a semiconductor device comprising:

• depositing a thin film semiconductor layer on a semiconductor substrate with an insulating film therebetween, the insulating film having been formed on a surface of the semiconductor substrate, and the thin film semiconductor layer being deposited to a film thickness;
• ion-implanting first impurity ions into the thin film semiconductor layer such that the first impurity ions reach only a partial thickness, less than an entirety of the film thickness, of the thin film semiconductor layer;
• selectively ion-implanting second impurity ions into the thin film semiconductor layer with a dose quantity per unit area more than a dose quantity per unit area of the first impurity ions;
• forming a diode for detecting temperature is formed by performing thermal treatment to activate the first and second impurity ions ion-implanted into the thin film semiconductor layer to thereby respectively form a first main electrode region having a first conductivity type and a second main electrode region having a second conductivity type in the thin film semiconductor layer, the first main electrode region and the second main electrode region being thinner than the film thickness.