Semiconductor isolation structure

Abstract

The invention relates to a semiconductor isolation structure. More particularly, the present invention relates to a semiconductor isolation structure suitable for providing high voltage isolation. Embodiments disclosed include a semiconductor structure (10) comprising: a first semiconductor region (R1), a second semiconductor region (R2) within the first semiconductor region (R1), and a voltage isolator (11) separating the first and second semiconductor regions (R1, R2), the voltage isolator (11) comprising: a nested series of insulating regions (T1, T2) around the perimeter of the second semiconductor region (R2), an intermediate semiconductor region (I1, I2) between each adjacent pair of nested insulating regions (T1, T2), and a voltage control device (12) comprising a conducting element (D1-D3) connected to at least one intermediate semiconductor region (I1, I2) in parallel with the at least one insulating region (T1, T2), so as to control a voltage across the at least one insulating region (T1, T2).

Dependencies are inferred from the claim text.