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US 9,543,255 B2Granted
Reduced-warpage laminate structure
AssigneeInternational Business Machines Corporation
InventorsMark C. Lamorey, Shidong Li, Janak G. Patel, Douglas O. Powell, David J. Russell, Peter Slota, Jr., David B. Stone
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Abstract
A laminate structure includes a conductive layer and a dielectric layer in contact with the conductive layer, the dielectric layer comprises a selectively patterned high-modulus dielectric material that balances a differential stress between the conductive layer and the dielectric layer to mechanically stiffen the laminate structure and reduce warpage.
Claims1
A method comprising:
- providing a coreless laminate structure;
- forming a conductive layer comprising a conductive material in the coreless laminate structure;
- selectively patterning the conductive layer to form a wiring pattern in the conductive layer;
- modifying the wiring pattern by adding or subtracting an amount of the conductive material in the wiring pattern according to a predetermined electrical design such that a coefficient of thermal expansion of the coreless laminate structure is modified to achieve a desired net stress in the coreless laminate structure;
- forming a dielectric layer comprising a nanofiber-reinforced dielectric material consisting of non-conductive nanofibers in contact with the wiring pattern, wherein the dielectric layer has a low coefficient of thermal expansion and imaging properties;
- and
- selectively patterning the dielectric layer to remove portions of the dielectric layer from areas of the coreless laminate structure in which an effective stiffness is low, wherein remaining portions of the dielectric layer balance a differential stress caused by a density of the conductive material between the wiring pattern and the dielectric layer to mechanically stiffen the coreless laminate structure and reduce thermal warpage.
4 more elements
Dependencies are inferred from the claim text.