Chamfered corner crackstop for an integrated circuit chip
AssigneeGlobalfoundries Inc.
InventorsMark C. Lamorey, David B. Stone
Life of this patent
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AssigneeGlobalfoundries Inc.
InventorsMark C. Lamorey, David B. Stone
Estimating the term…
A corner crackstop is formed in each of the four corners of an integrated circuit (IC) chip, in which the corner crackstop differs structurally from a portion of the crackstop disposed along the sides of the IC chip. Each corner crackstop includes a plurality of layers, formed on a top surface of a silicon layer of the IC chip, within a perimeter boundary region that comprises a triangular area, in which a right angle is disposed on a bisector of the corner, equilateral sides of the triangle are parallel to sides of the IC chip, and the right angle is proximate to the corner relative to a hypotenuse of the triangle. The plurality of layers of the corner crackstop include crackstop elements, each comprising a metal cap centered over a via bar, in which the plurality of layers of the corner crackstop is chamfered to deflect crack ingress forces by each corner crackstop.
A corner crackstop comprising:
Dependencies are inferred from the claim text.