Semiconductor component and method for producing a semiconductor component
AssigneeOSRAM Opto Semiconductors GmbH
InventorsChristoph Eichler, Uwe Strauss
Life of this patent
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Abstract
A method can be used to produce a semiconductor component. A semiconductor layer sequence has an active region that is provided for generating radiation and also has an indicator layer. Material of the semiconductor layer sequence that is arranged on that side of the indicator layer that is remote from the active region is removed in regions. The material is removed using a dry-chemical removal of the semiconductor layer sequence. A property of a process gas is monitored during the removal to determine that the indicator layer has been reached based on a change in the property of the process gas.
Claims20
A method for producing a semiconductor component, the method comprising:
- providing a semiconductor layer sequence comprising a III-V compound semiconductor material and having an active region that is provided for generating radiation, the semiconductor layer sequence also having an indicator layer;
- removing material of the semiconductor layer sequence that is arranged on a side of the indicator layer that is remote from the active region in regions, the material being removed using a dry-chemical removal of the semiconductor layer sequence;
- and
- monitoring a property of a process gas during the removal, and determining that the indicator layer has been reached based on a change in the property of the process gas, wherein the property of the process gas is a spectral composition of radiation emitted by the process gas, wherein the process gas comprises oxygen at least at times, and wherein the indicator layer has a higher aluminum content than a material disposed directly upstream of the indicator layer as viewed in a removal direction.
Dependencies are inferred from the claim text.