Substrate support with controlled sealing gap
AssigneeApplied Materials, Inc.
InventorsOlkan Cuvalci, Joel M. Huston, Gwo-Chuan Tzu
Life of this patent
Estimating the term…
Abstract
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a support plate having a support surface to support a substrate, a support ring to support a substrate at a perimeter of the support surface; and a plurality of first support elements disposed in the support ring, wherein an end portion of each of the first support elements is raised above an upper surface of the support ring to define a gap between the upper surface of the support ring and an imaginary plane disposed on the end portions of the plurality of first support elements.
Claims19
A substrate support, comprising:
- a support plate having a support surface to support a substrate, wherein the support surface spans the entire width of the support plate;
- a support ring to support a substrate at a perimeter of the substrate support;
- a plurality of first support elements disposed in the support ring, wherein an end portion of each of the first support elements is raised above an upper surface of the support ring to define a gap between the upper surface of the support ring and an imaginary plane disposed on the end portions of the plurality of first support elements;
- a vacuum source;
- and
- one or more ports disposed in the support surface of the support plate, wherein all ports disposed in the support surface are fluidly coupled to the vacuum source, and
- wherein the support ring rests on the support plate along an entire circumference of the support ring.
A substrate support, comprising:
- a support plate having an outer sidewall;
- a support ring to support a substrate above the support plate, wherein an outer sidewall of the support ring and the outer sidewall of the support plate form a common outer sidewall of the substrate support, and wherein the support ring rests on the support plate along an entire perimeter of the support ring;
- and
- a plurality of first support elements disposed in the support ring, wherein an end portion of each of the first support elements is raised above an upper surface of the support ring to define a gap between the upper surface of the support ring and an imaginary plane disposed on the end portions of the plurality of first support elements.
Dependencies are inferred from the claim text.