Collimator for use in substrate processing chambers
AssigneeApplied Materials, Inc.
InventorMartin Lee Riker
Life of this patent
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Abstract
Embodiments of collimators for use in substrate processing chambers are provided herein. In some embodiments, a collimator includes: a body having a central region, a peripheral region, and a transitional region disposed between the central and peripheral regions; a first plurality of apertures in the central region having a first aspect ratio; a second plurality of apertures in the peripheral region having a second aspect ratio less than the first aspect ratio; and a third plurality of apertures in the transitional region, wherein the third plurality of apertures are cut so the transitional region forms a conical shape surrounding the central region.
Claims20
A collimator for use in a substrate processing chamber, comprising:
- a body having a central region, a peripheral region, and a transitional region disposed between the central and peripheral regions;
- a first plurality of apertures in the central region having a first aspect ratio;
- a second plurality of apertures in the peripheral region having a second aspect ratio less than the first aspect ratio;
- and
- a third plurality of apertures in the transitional region, wherein the third plurality of apertures are cut so the transitional region forms a conical shape surrounding the central region,
- wherein the central region has a circular edge formed by the transitional region.
A collimator for use in a substrate processing chamber, comprising:
- a body having a central region, a peripheral region, and a transitional region disposed between the central and peripheral regions;
- a first plurality of apertures in the central region having a first aspect ratio;
- a second plurality of apertures in the peripheral region having a second aspect ratio less than the first aspect ratio;
- and
- a third plurality of apertures in the transitional region, wherein the third plurality of apertures are cut so the transitional region forms a conical shape surrounding the central region,
- wherein the first plurality of apertures, the second plurality of apertures, and the third plurality of apertures are textured,
- wherein upper portions of the first plurality of apertures, the second plurality of apertures, and the third plurality of apertures include a chamfer, and
- wherein the central region has a circular edge formed by the transitional region.
A substrate processing chamber, comprising:
- a chamber body defining an inner volume;
- a sputtering target disposed in an upper portion of the inner volume;
- a substrate support disposed below the sputtering target;
- and
- a collimator disposed in the inner volume between the sputtering target and the substrate support, wherein the collimator comprises:
- a body having a central region, a peripheral region, and a transitional region disposed between the central and peripheral regions;
- a first plurality of apertures in the central region having a first aspect ratio;
- a second plurality of apertures in the peripheral region having a second aspect ratio less than the first aspect ratio;
- and
- a third plurality of apertures in the transitional region, wherein the third plurality of apertures are cut so the transitional region forms a conical shape surrounding the central region,
- wherein the central region has a circular edge formed by the transitional region.
Dependencies are inferred from the claim text.