Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus
AssigneeNuFlare Technology, Inc.
InventorHiroshi Matsumoto
Life of this patent
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Abstract
A blanking device for multi charged particle beams includes a plurality of individual blanking mechanisms configured to individually deflect a corresponding beam of multi charged particle beams so as to control ON/OFF of the corresponding beam, and a common blanking mechanism configured to include a plurality of electrode groups, each composed of facing electrodes, where an array pitch of a plurality of electrode groups is smaller than or equal to a pitch of the multi charged particle beams, and to collectively deflect the multi charged particle beams in order to control an exposure time.
Claims8
A blanking device for multi charged particle beams comprising:
- a plurality of individual blanking mechanisms configured to individually deflect a corresponding beam of multi charged particle beams so as to control ON/OFF of the corresponding beam;
- and
- a common blanking mechanism configured to include a plurality of electrode groups, each composed of facing electrodes, where an array pitch of the plurality of electrode groups is smaller than or equal to a pitch of the multi charged particle beams, and to collectively deflect the multi charged particle beams in order to control an exposure time,
- wherein each of the plurality of electrode groups includes a control electrode and a counter electrode which is grounded,
- the whole control electrodes of the plurality of electrode groups are arranged to be electrically connected with each other,
- the whole counter electrodes of the plurality of electrode groups are arranged to be electrically connected with each other, and
- the common blanking mechanism includes a common amplifier which outputs an ON voltage to be collectively applied to the whole control electrodes electrically connected with each other to control the exposure time.
A multi charged particle beam writing apparatus comprising:
- a stage configured to mount a target object thereon and to be continuously movable;
- an emitter configured to emit a charged particle beam;
- an aperture member, in which a plurality of openings are formed, configured to form multi beams by making a region including a whole of the plurality of openings irradiated by the charged particle beam and by letting portions of the charged particle beam individually pass through a corresponding one of the plurality of openings;
- a plurality of individual blanking mechanisms configured to individually deflect a corresponding beam of the multi beams in order to control ON/OFF the corresponding beam;
- a common blanking mechanism configured to include a plurality of electrode groups, each composed of facing electrodes, where an array pitch of the plurality of electrode groups is smaller than or equal to a pitch of the multi beams, and to collectively deflect the multi beams in order to control an exposure time;
- and
- a limiting aperture member configured to block each beam having been deflected to be in an off state by at least one of the plurality of individual blanking mechanisms and the common blanking mechanism,
- wherein each of the plurality of electrode groups includes a control electrode and a counter electrode which is grounded,
- the whole control electrodes of the plurality of electrode groups are arranged to be electrically connected with each other,
- the whole counter electrodes of the plurality of electrode groups are arranged to be electrically connected with each other, and
- the common blanking mechanism includes a common amplifier which outputs an ON voltage to be collectively applied to the whole control electrodes electrically connected with each other to control the exposure time.
Dependencies are inferred from the claim text.