Specimen cryo holder and dewar
AssigneeHitachi High-Technologies Corporation
InventorsYasuhira Nagakubo, Takashi Mizuo
Life of this patent
Estimating the term…
Abstract
In an existing specimen cryo holder, a change in the orientation of a specimen would lead to tilting of a dewar together with the specimen and hence to bubbling of a cooling source contained in the dewar. In view of this, a specimen cryo holder, including a mechanism capable of cooling a specimen while keeping the posture of a dewar in a fixed direction even when the specimen is tilted into a direction suitable for processing or observation thereof, is provided. Also provided is a dewar in which a vacuum maintenance mechanism is mounted to an outer vessel so that an inner vessel holding a cooling source therein is vacuum-insulated from the outside air.
Claims9
A specimen cryo holder comprising:
- a cryo specimen base support to which to mount a cryo specimen base carrying thereon a specimen to be processed or observed using charged particles;
- a first heat conduction member transmitting heat transmitted from a cooling source to the cryo specimen base support, the first heat conduction member being deformed according to a change in orientation of the specimen;
- a second heat conduction member transmitting heat of the cooling source to the first heat conduction member;
- a first tubular member;
- and
- a dewar mounting part on which a dewar containing the cooling source is detachably mounted, wherein
- a tip portion of the first heat conduction member is fixed to the cryo specimen base support, and
- the first tubular member is attached rotatably to the dewar mounting part, accommodates the first and second heat conduction members such that the first and second heat conduction members are movable in an internal space of the first tubular member, and inclines the sample by rotating independently of the second heat conduction member and the dewar.
Dependencies are inferred from the claim text.