Method and apparatus for generating X-ray radiation

Method according to 1, characterized in that the specific radiation dose rate curve is determined from the predetermined radiation dose rate curves or that the specific radiation dose rate curve is determined from specification values for a specific radiation dose rate curve.

Method for generating X-ray radiation with a specific radiation dose rate curve, characterized in that the X-ray radiation is generated by proportionally composing the X-ray radiation with the specific radiation dose rate curve from a first specification X-ray radiation with a predetermined first radiation dose rate curve and a second specification X-ray radiation with a predetermined second radiation dose rate curve, wherein the second specification X-ray radiation and wherein each of the specific dose rate curve, the predetermined first radiation dose rate curve, and the predetermined second radiation dose rate curve represents a radiation dose rate as a function of distance.

Apparatus for generating a specific radiation dose rate curve for an X-ray radiation for irradiating a substrate, wherein the specific radiation dose rate curve represents a radiation dose rate as a function of distance, characterized in that the apparatus has a selection appliance for selecting at least two predetermined radiation dose rate curves, which are different from the specific radiation dose rate curve which is to be generated, each of which represents a radiation dose rate as a function of distance, and that the apparatus has an appliance for proportionally composing the specific radiation dose rate curve from the at least two predetermined radiation dose rate curves.

Apparatus for generating X-ray radiation with a specific radiation dose rate curve characterized in that the apparatus has an appliance for providing a first specification X-ray radiation with a specified first radiation dose rate curve and a and wherein each of the specific dose rate curve, the predetermined first radiation dose rate curve, and the predetermined second radiation dose rate curve represents a radiation dose rate as a function of distance with a predetermined second radiation dose rate curve, wherein the second specification X-ray radiation is different from the first specification X-ray radiation, and that the apparatus has an appliance for proportionally composing the X-ray radiation with the specific radiation dose rate curve from the first specification X-ray radiation and the second specification X-ray radiation.

Method for generating X-ray radiation with a specific radiation dose rate curve, characterized in that the X-ray radiation is generated by proportionally composing the X-ray radiation with the specific radiation dose rate curve from a first specification X-ray radiation with a known first radiation dose rate curve and a second specification X-ray radiation with a known second radiation dose rate curve, wherein the second specification X-ray radiation differs from the first specification X-ray radiation.

Apparatus for generating X-ray radiation with a specific radiation dose rate curve, characterized in that the apparatus has an appliance for providing a first specification X-ray radiation with a known first radiation dose rate curve and a second specification X-ray radiation with a known second radiation dose rate curve, wherein the second specification X-ray radiation is different from the first specification X-ray radiation, and that the apparatus has an appliance for proportionally composing the X-ray radiation with the specific radiation dose rate curve from the first specification X-ray radiation and the second specification X-ray radiation.