Imprint method and imprint system
AssigneeKabushiki Kaisha Toshiba
InventorsMasato Suzuki, Takuya Kono, Manabu Takakuwa, Kazuya Fukuhara
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AssigneeKabushiki Kaisha Toshiba
InventorsMasato Suzuki, Takuya Kono, Manabu Takakuwa, Kazuya Fukuhara
Estimating the term…
According to one embodiment, an imprint method comprises coating a photo-curable organic material on a film to be processed, bringing a concave-convex pattern of a template into contact with the photo-curable organic material, applying a force to the template in such a state that the template is brought into contact with the photo-curable organic material, curing the photo-curable organic material by irradiating light onto the photo-curable organic material, in such a state that the template is brought into contact with the photo-curable organic material, and releasing the template from the photo-curable organic material after the light irradiation. The force applied to the template corresponds to a gap between a surface of the film to be processed and the template.
An imprint method comprising:
An imprint method comprising:
Dependencies are inferred from the claim text.