Guide pattern data correcting method, pattern forming method, and computer readable record medium
AssigneeKabushiki Kaisha Toshiba
InventorHiroki Yonemitsu
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Abstract
According to one embodiment, a guide pattern data correcting method is for correcting guide pattern data of a physical guide for formation of a polymer material to be microphase-separated. The physical guide has a plurality of concave portions in the guide pattern data, and at least two concave portions out of the plurality of concave portions are connected to each other. The guide pattern data is subjected to correction by shifting or rotation of at least either of the two connected concave portions.
Claims3
A guide pattern data generating method for correcting guide pattern data of a physical guide for formation of a block copolymer material to be microphase-separated,
- wherein:
- the physical guide has a plurality of portions in the guide pattern data, the plurality of portions being disposed along a predetermined direction within a plane based on the pattern data of the plurality of portions, the pattern data of the plurality of portions being included in the guide pattern data, and
- at least two portions out of the plurality of portions are connected to each other,
- the method comprising:
- subjecting the guide pattern data to correction in such a manner that the portions that have both ends respectively connected to other portions rotate about the portion's centroid within the plane wherein:
- the plurality of portions have the same rotation angle;
- and
- the correction causes the size of a region shared by the at least two connected portions to reduce.
Dependencies are inferred from the claim text.