Cross-linkable fluorinated photopolymer
AssigneeOrthogonal, Inc.
InventorsDouglas Robert Robello, Charles Warren Wright
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Abstract
A photosensitive composition comprises a fluorinated solvent, a photo-acid generator and a copolymer. The copolymer comprises at least three distinct repeating units, including a first repeating unit having a fluorine-containing group, a second repeating unit having an acid-catalyzed cross-linkable group, and a third repeating unit having a sensitizing dye. The composition is useful in the fabrication of electronic devices, especially organic electronic and bioelectronic devices.
Claims19
A photosensitive composition comprising:
- a fluorinated solvent;
- a photo-acid generator;
- and
- a copolymer comprising at least three distinct repeating units, including a first repeating unit having a fluorine-containing group, a second repeating unit having an acid-catalyzed cross-linkable group, and a third repeating unit having a sensitizing dye.
A method of patterning a device, comprising:
- forming a photopolymer layer on a device substrate, the photopolymer layer including a photo-acid generator and a copolymer, wherein the copolymer comprises at least three distinct repeating units, including a first repeating unit having a fluorine-containing group, a second repeating unit having an acid-catalyzed cross-linkable group, and a third repeating unit having a sensitizing dye;
- exposing the photopolymer layer to patterned radiation to form an exposed photopolymer layer;
- and
- contacting the exposed photopolymer layer with a developing agent to remove unexposed photopolymer, thereby forming a developed structure having a first pattern of exposed photopolymer covering the substrate and a complementary second pattern of uncovered substrate corresponding to the unexposed photopolymer.
An article comprising a layer of a copolymer having at least three distinct repeating units, including a first repeating unit having a fluorine-containing alkyl group, a second repeating unit having an alkyl ether group that is cross linked to an alkyl ether group of another second repeating unit, and a third repeating unit having a sensitizing dye that has a light absorption peak in a range of 300 to 450 nm, wherein the copolymer has a total fluorine content in a weight range of 15 to 60%.
Dependencies are inferred from the claim text.