Optical filter device, optical module, and electronic apparatus

An optical module comprising:

• a light interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film provided on the first substrate, a second reflection film provided on the second substrate and facing the first reflection film, and a gap change unit that changes a gap dimension between the first reflection film and the second reflection film;
• a casing having a base substrate that fixes the light interference filter, and a lid that is joined to the base substrate and forms an internal space capable of housing the light interference filter between the base substrate and the lid;
• and
• a detection unit that detects light taken out by the light interference filter;
• wherein the second substrate has an annular recessed portion provided on a surface opposite to the first substrate, the annular recessed portion is disposed outside of a light interference region where the first reflection film and the second reflection film overlap with each other, as viewed in a plan view of the first substrate and the second substrate seen from a direction of substrate thickness,
• the base substrate has a first base substrate and a second base substrate, the first base substrate being disposed between the second base substrate and the second substrate,
• the base substrate has a light transmission hole corresponding to a light transmission region, the light transmission hole having a first light transmission hole of the first base substrate and a second light transmission hole of the second base substrate,
• a first outer peripheral edge of the first light transmission hole overlaps with the annular recessed portion in the plan view, and a second outer peripheral edge of the second light transmission hole is disposed inboard from the first outer peripheral edge in the plan view, and
• the surface opposite to the first substrate of the second substrate is joined to the base substrate.

An electronic apparatus comprising:

• a light interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film provided on the first substrate, a second reflection film provided on the second substrate and facing the first reflection film, and a gap change unit that changes a gap dimension between the first reflection film and the second reflection film;
• and
• a casing having a base substrate that fixes the light interference filter, and a lid that is joined to the base substrate and forms an internal space capable of housing the light interference filter between the base substrate and the lid;
• wherein the second substrate has an annular recessed portion provided on a surface opposite to the first substrate, the annular recessed portion is disposed outside of a light interference region where the first reflection film and the second reflection film overlap with each other, as viewed in a plan view of the first substrate and the second substrate seen from a direction of substrate thickness,
• the base substrate has a first base substrate and a second base substrate, the first base substrate being disposed between the second base substrate and the second substrate,
• the base substrate has a light transmission hole corresponding to a light transmission region, the light transmission hole having a first light transmission hole of the first base substrate and a second light transmission hole of the second base substrate,
• a first outer peripheral edge of the first light transmission hole overlaps with the annular recessed portion in the plan view, and a second outer peripheral edge of the second light transmission hole is disposed inboard from the first outer peripheral edge in the plan view, and
• the surface opposite to the first substrate of the second substrate is joined to the base substrate.