Photoelectric hybrid device and method for manufacturing same

A manufacturing method of a photoelectric hybrid device, the method comprising:

• preparing a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, an electronic circuit, an optical modulator, an optical receiver, and/or a light source;
• preparing a translucent member having a translucent part and a flat optical surface;
• aligning the translucent member with the photoelectric hybrid substrate, and installing the translucent member to the photoelectric hybrid substrate;
• supplying a photocurable resin, that is cured by applying light thereto, to a space between the photoelectric hybrid substrate and the translucent member;
• exposing the photocurable resin to the light for forming a vertical optical waveguide in a place between the translucent part and the optical waveguides;
• and
• removing part of the photocurable resin that is not cured,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.

A manufacturing method of a photoelectric hybrid device, the method comprising:

• preparing a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, an electronic circuit, an optical modulator, an optical receiver, and/or a light source;
• preparing a translucent member having a translucent part and a flat optical surface;
• aligning the translucent member with the photoelectric hybrid substrate, and installing the translucent member to the photoelectric hybrid substrate;
• supplying a photocurable resin, that is cured by applying light thereto, into a space between the photoelectric hybrid substrate and the translucent member, and onto the photoelectric hybrid substrate;
• exposing the photocurable resin to the light for forming a vertical optical waveguide in a place between the translucent part and the optical waveguides, and also exposing the photocurable resin located on a peripheral part of the electronic circuit;
• and
• removing part of the photocurable resin that is not cured,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.

A manufacturing method of a photoelectric hybrid device, the method comprising:

• preparing a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, an electronic circuit, an optical modulator, an optical receiver, and/or a light source;
• preparing a translucent member having a translucent part and a flat optical surface;
• aligning the translucent member with the photoelectric hybrid substrate, and installing the translucent member to the photoelectric hybrid substrate;
• supplying a photocurable resin for a core, for forming a core part of a vertical optical waveguide;
• exposing the photocurable resin for the core to the light for forming a core part of the vertical optical waveguide in a place between the translucent part and the optical waveguides;
• removing part of the photocurable resin for the core that is not cured;
• supplying a photocurable resin for a clad into a space between the photoelectric hybrid substrate and the translucent member and onto the photoelectric hybrid substrate, for forming a clad part of the vertical optical waveguide;
• exposing the photocurable resin for the clad, that is located in the clad part and on a peripheral part of the electronic circuit, to the light;
• and
• removing part of the photocurable resin for the clad that is not cured,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.

A manufacturing method of a photoelectric hybrid device, the method comprising:

• preparing a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, an electronic circuit, an optical modulator, an optical receiver, and/or a light source;
• preparing a translucent member having a translucent part and a flat optical surface;
• aligning the translucent member with the photoelectric hybrid substrate, and installing the translucent member to the photoelectric hybrid substrate;
• supplying a photocurable resin for a core into a space between the photoelectric hybrid substrate and the translucent member and onto the photoelectric hybrid substrate, for forming a core part of a vertical optical waveguide;
• exposing the photocurable resin for the core, that is located in the core part and on part of a peripheral part of the electronic circuit, to the light;
• removing part of the photocurable resin for the core that is not cured;
• supplying a photocurable resin for a clad into a space between the photoelectric hybrid substrate and the translucent member and onto the photoelectric hybrid substrate, for forming a clad part of the vertical optical waveguide;
• exposing the photocurable resin for the clad, that is located in the clad part and the remainder of the peripheral part of the electronic circuit, to the light;
• and
• removing part of the photocurable resin for the clad that is not cured,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.

A manufacturing method of a photoelectric hybrid device, the method comprising:

• preparing a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, an electronic circuit, an optical modulator, an optical receiver, and/or a light source;
• aligning a photomask with the photoelectric hybrid substrate, and placing the photomask in relation to the photoelectric hybrid substrate;
• supplying a photocurable resin to a space between the photoelectric hybrid substrate and the photomask, wherein the photocurable resin is cured when irradiated with light;
• exposing the photocurable resin via the photomask to form a vertical optical waveguide that becomes an input/output path of an optical signal;
• removing part of the photocurable resin that is not cured;
• and
• removing the photomask,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.

A manufacturing method of a photoelectric hybrid device, the method comprising:

• on a photoelectric hybrid substrate provided with optical waveguides for communicating optical signals, electric signal paths for communicating electric signals, and an electronic circuit, and further provided with an optical modulator and a light source, and/or an optical receiver, placing a sealing structure for covering the photoelectric hybrid substrate except for a specific part used for inputting/outputting optical signals to/from the photoelectric hybrid substrate;
• preparing a glass wafer;
• preparing a photomask, supplying a photocurable resin into a space between the glass wafer and the photomask, forming plural optical waveguides at the same time on the glass wafer by exposing the photocurable resin through the photomask by light, and filling and curing a clad member, thereby forming plural vertical optical waveguides on the glass wafer;
• dicing the glass wafer, on which the plural vertical optical waveguides are formed, to form respective vertical optical waveguide units;
• and
• integrating the vertical optical waveguide unit into the specific part used for inputting/outputting optical signals to/from the photoelectric hybrid substrate, in such a manner that a back surface of a surface on which the vertical optical waveguide is formed is defined to be a flat optical surface and placed to be an upper surface,
• wherein the photoelectric hybrid device is constructed to input and output electric signals, and input and output optical signals via the vertical optical waveguide, and
• wherein the photoelectric hybrid device is used as a signal conversion element when the photoelectric hybrid device is incorporated into a module for data communication.