Inspection apparatus for article storage facility

An article storage facility including an inspection apparatus, the article storage facility comprising:

• a plurality of storage sections each including a placement support portion on which is placed and supported a transport container having a supply port for an inactive gas formed at a bottom portion thereof, the transport container provided for accommodating a number of substrates that is less than or equal to a predetermined number of substrates in a sealed state, the storage sections being capable of storing the transport containers in a state in which the transport containers are supported on the placement support portions;
• an inactive gas supply portion including a supply nozzle that is a nozzle provided in the placement support portion, and that is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container, and
• an inspection apparatus for inspecting a state of supply of the inactive gas by the inactive gas supply portion in a state in which the inspection apparatus is supported on the placement support portion,
• wherein the placement support portion includes a plurality of support member-side connecting portions provided with the supply nozzle or a discharge nozzle for releasing the inactive gas from the interior of the transport container, and a plurality of engaging portions engageable with the bottom portion of the transport container, and
• wherein the inspection apparatus comprises:
• an inspection supply port that is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion,
• a plate-shaped element supported only by the plurality of support member-side connecting portions and the plurality of engaging portions with the inspection apparatus being supported on the placement support portion, and
• a flowmeter, an inspection controller, and a battery mounted on the plate-shaped element, and
• wherein the inspection apparatus is configured such that a gravity center position of the inspection apparatus in a direction along a horizontal plane in the state in which the inspection apparatus is supported on the placement support portion coincides with a gravity center position of the transport container in a direction along a horizontal plane in the state in which the transport container is supported on the placement support portion.