Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
AssigneeI Am Research Corporation
InventorRoger Patrick
Life of this patent
Estimating the term…
Abstract
Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
Claims13
A consumable part of a plasma reaction chamber, the consumable part comprising:
- an electrode formed of electrically conductive material and including a surface to be exposed to plasma;
- conductive elements embedded in the electrically conductive material of the electrode and entirely surrounded by and electrically insulated from the electrically conductive material of the electrode by a dielectric layer;
- the electrode configured such that the conductive elements can be coupled to a probe circuit which can be coupled to a power supply and ground to apply a bias potential to the conductive elements relative to ground;
- and
- the conductive elements are operative to draw a current from the plasma upon exposure of the conductive elements to the plasma and the conductive elements are electrically connected to each other by a conductive wire embedded in and electrically insulated from the electrically conductive material of the electrode.
A consumable part configured as a diagnostic sensor for monitoring the operational condition and structural status of an edge ring for use in a plasma reaction chamber, comprising:
- an edge ring of dielectric material including a surface to be exposed to plasma when the edge ring is mounted in the plasma reaction chamber;
- a plurality of probes of electrically conductive material completely surrounded by and
- embedded in the edge ring and arranged circumferentially at a preset angular interval about a central axis of the edge ring, and
- a connection wire embedded in the edge ring and electrically connected to each of the plurality of probes.
Dependencies are inferred from the claim text.