Inspection apparatus using polarized lights

Abstract

An inspection apparatus using polarized lights according to one aspect of the present invention includes an irradiator configured to irradiate an inspection target with a first plurality of lights. The first plurality of lights have different polarization states and different wavelengths from each other. The inspection apparatus further includes a light receiver configured to perform a wavelength demultiplexing of a second plurality of lights obtained from the inspection target to generate a third plurality of lights, to separately receive the third plurality of lights, and to output at least one light-receiving signal associated with the third plurality of lights and a processor configured to calculate at least one of an ellipse azimuth, a degree of polarization, and a polarization component intensity using the light-receiving signal and to determine whether the inspection target is defective or non-defective.

Dependencies are inferred from the claim text.