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US 9,541,460 B2Granted
Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorYusuke Matsuzawa
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes a semiconductor substrate, a diaphragm section that is disposed on the semiconductor substrate and is flexurally deformed when receiving pressure, a sensor element that is disposed on the diaphragm section, an element-periphery structure member that is disposed on one surface side of the semiconductor substrate and forms a cavity section together with the diaphragm section, and a semiconductor circuit that is provided on the same surface side as the element-periphery structure member of the semiconductor substrate.
Claims12
A physical quantity sensor comprising:
- a semiconductor substrate;
- a diaphragm section that is disposed above the semiconductor substrate and does not include the semiconductor substrate and is flexurally deformed when receiving pressure;
- a plurality of sensor elements that are formed on a top surface of the diaphragm section;
- a wall section that is disposed above one surface side of the semiconductor substrate and configures a cavity together with the diaphragm section;
- and
- a circuit section that is provided above the same surface side as the wall section of the semiconductor substrate,
- wherein the wall section includes an inter-layer insulation film formed on a wiring layer of the circuit section, and
- wherein the inter-layer insulation film has an annular shape to surround the plurality of sensor elements in a plan view.
5 more elements
Dependencies are inferred from the claim text.