Shape measuring method and device

Abstract

The purpose of the present invention is to provide a shape inspection device that improves, without making the device larger, durability and measurement precision by measuring a plurality of points with a single distance sensor. The present invention provides a shape measuring device that measures the shape of an object to be measured and that comprises: a distance sensor that calculates the distance to the object to be measure by irradiating a measurement light toward the object to be measured and detecting the reflected light from the object to be measured; a separating unit that separates the measurement light from the distance sensor into a plurality of measurement light rays to be irradiated onto a plurality of measuring points; and a selecting unit that selects, from the plurality of measurement light beams separated by the separating unit, the measurement light to irradiate the object to be measured.

Dependencies are inferred from the claim text.