Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads

A substrate processing system, comprising:

• a process chamber having a reconfigurable showerhead coupled to a gas supply for providing one or more process gases to the process chamber, the reconfigurable showerhead comprising a body having a plurality of annular plenums disposed therein and a plurality of passageways disposed outside each of the plurality of annular plenums and fluidly coupled to the gas supply at a first end and to each plenum of the plurality of annular plenums at an opposite end to allow gas to flow into the plurality of annular plenums from each passageway, wherein each of the plurality of annular plenums is coupled to a substrate-facing side of the body by a plurality of conduits disposed through the body, and a plurality of annular inserts removably disposed within the plurality of annular plenums, wherein the plurality of annular inserts are configured to change the number of conduits coupled to a given passageway, wherein the plurality of annular inserts each comprise one or more flow paths formed therein to allow a flow of gas therethrough, and wherein the one or more flow paths extend from an upper surface of each of the plurality of annular inserts to a substrate-facing surface of the plurality of annular inserts.

A reconfigurable showerhead, comprising:

• a body having a plurality of passageways and one or more annular plenums disposed therein, wherein the plurality of passageways are disposed outside of the one or more annular plenums, wherein each of the one or more annular plenums are coupled to a substrate-facing side of the body by a plurality of conduits disposed through the body, and wherein at least two of the plurality of passageways are coupled to at least one plenum of the one or more annular plenums to allow gas to flow into the at least one plenum from each of the at least two of the plurality of passageways;
• and
• one or more annular inserts configured to be removably disposed within the one or more annular plenums, wherein the one or more annular inserts are configured to change the number of conduits coupled to a given passageway, wherein the one or more annular inserts comprise one or more flow paths formed therein to allow a flow of gas therethrough, and wherein the one or more flow paths extend from an upper surface of each of the one or more annular inserts to a substrate-facing surface of the one or more annular inserts.