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US 9,540,539 B2Granted
Primer composition, method of forming a primer layer on a semiconductor device, and method of encapsulating a semiconductor device
AssigneeInfineon Technologies AG
InventorsSwee Kah Lee, Joachim Mahler, Chew Theng Tai, Yik Yee Tan, Soon Lock Goh, Poh Cheng Lim, Jagen Krishnan, Peh Hean Teh
Life of this patent
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Abstract
A primer composition is provided. The primer composition includes at least one bi- or multi-functional benzoxazine compound; and at least one compound including a functional group having affinity for a metallic surface, and a cross-linkable group. A method of forming a primer layer on a semiconductor device, and a method of encapsulating a semiconductor device are also provided.
Claims14
A primer composition for semiconductor devices, comprising
- (a) at least one bi- or multi-functional benzoxazine compound;
- (b) a functional group having affinity for a metallic surface, wherein the functional group is selected from the group consisting of a carboxy group, an organophosphorous group, an amine, and combinations thereof;
- wherein the carboxy group is selected from the group consisting of an acyl halide, a carboxylic acid, an amide, a thiol ester, a mercaptocarbonyl, and combinations thereof;
- wherein the amine is selected from the group consisting of an aliphatic diamine, a polymerized aliphatic polyamine, a N-methylaniline, a N,N-dimethyl aniline, a diamino benzene;
- a cycloaliphatic amine, a urea, a thiourea, a diphenyl urea, a diphenyl thiourea, and combinations thereof;
- and
- (c) a cross-linkable group selected from the group consisting of a sulfonyl group, a nitro group, a halogen group, a cyano group, a carboxy group, an amine group, an epoxy group, an organosilicon group, an isocyanate group, and combinations thereof;
- wherein the epoxy group is 5-epoxypentylisocyanate;
- wherein the amine is selected from the group consisting of an aliphatic diamine, a polymerized aliphatic polyamine, a N-methylaniline;
- a N,N-dimethyl aniline;
- a diamino benzene;
- a cycloaliphatic amine, a urea, a thiourea, a diphenyl urea, a diphenyl thiourea, and combinations thereof;
- wherein the organosilicon group is selected from the group consisting of a silane, a siloxane, a siloxide, a silyl halide, and combinations thereof;
- wherein the silane is selected from the group consisting of an alkylalkoxysilane, a cyclic alkylsilane, and combinations thereof;
- wherein the cross-linkable group couples the at least one bi-or multi-functional benzoxazine compound with the functional group having an affinity for a metallic surface;
- and wherein the cross-linkable group is different from the functional group.
13 more elements
Molding composition comprising a primer composition, the primer composition comprising
- (a) at least one bi- or multi-functional benzoxazine compound;
- (b) a functional group having affinity for a metallic surface, wherein the functional group is selected from the group consisting of a carboxy group, an organophosphorous group, an amine, and combinations thereof;
- wherein the carboxy group is selected from the group consisting of an acyl halide, a carboxylic acid, an amide, a thiol ester, a mercaptocarbonyl, and combinations thereof;
- wherein the amine is selected from the group consisting of an aliphatic diamine, a polymerized aliphatic polyamine, a N-methylaniline, a N,N-dimethyl aniline, a diamino benzene;
- a cycloaliphatic amine, a urea, a thiourea, a diphenyl urea, a diphenyl thiourea, and combinations thereof;
- and
- (c) a cross-linkable group selected from the group consisting of a sulfonyl group, a nitro group, a halogen group, a cyano group, a carboxy group, an amine group, an epoxy group, an organosilicon group, an isocyanate group, and combinations thereof;
- wherein the epoxy group is 5-epoxypentylisocyanate;
- wherein the amine is selected from the group consisting of an aliphatic diamine, a polymerized aliphatic polyamine, a N-methylaniline;
- a N,N-dimethyl aniline;
- a diamino benzene;
- a cycloaliphatic amine, a urea, a thiourea, a diphenyl urea, a diphenyl thiourea, and combinations thereof;
- wherein the organosilicon group is selected from the group consisting of a silane, a siloxane, a siloxide, a silyl halide, and combinations thereof;
- wherein the silane is selected from the group consisting of an alkylalkoxysilane, a cyclic alkylsilane, and combinations thereof;
- wherein the at least one bi- or multi-functional benzoxazine compound forms a benzoxazine network with the mold composition;
- and wherein the cross-linkable group is different from the functional group.
13 more elements
Dependencies are inferred from the claim text.