Composition for forming liquid immersion upper layer film, and polymer
AssigneeJsr Corporation
InventorsKiyoshi Tanaka, Kazunori Kusabiraki, Takahiro Hayama, Motoyuki Shima
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AssigneeJsr Corporation
InventorsKiyoshi Tanaka, Kazunori Kusabiraki, Takahiro Hayama, Motoyuki Shima
Estimating the term…
An immersion upper layer film-forming composition includes [A] a polymer component that includes a polymer (A1), and [B] a solvent, the polymer (A1) including a structural unit (I) that includes a group represented by the following formula (i). The structural unit (I) is preferably a structural unit (I-1) represented by the following formula (1). The polymer component [A] preferably further includes a structural unit (II-1) represented by the following formula (2), the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1). The polymer component [A] preferably further includes a structural unit (III) that includes a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1).
An immersion upper layer film-forming composition comprising:
A polymer comprising:
Dependencies are inferred from the claim text.