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US 9,540,476 B2Granted
Aromatic resins for underlayers
AssigneesRohm and Haas Electronic Materials LLC, Rohm and Haas Electronic Materials Korea Ltd.
InventorsLi Cui, Sung Wook Cho, Mingqi Li, Shintaro Yamada, Peter Trefonas, III, Robert L. Auger
Life of this patent
Estimating the term…
Abstract
Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.
Claims13
A reaction product formed from a combination comprising one or more first monomers of the formula
- wherein Y is selected from H, C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1;
- each R is independently selected from C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR1, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1;
- R1 is selected from H, C1-C30alkyl, C6-C30aryl, substituted C6-C30aryl, and C7-C30aralkyl;
- and n is an integer selected from 0 to 7;
- and one or more second monomers of the formula Ar—CHO, where Ar is a C10-C30aromatic moiety having at least 2 fused aromatic rings, which may optionally be substituted with one or more of C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR3, —C1-C30alkylene-OR3 and —C1-C30alkylidene-OR3;
- R3 is selected from H, C1-C30alkyl, and C6-C30aryl.
3 more elements
A process for preparing a reaction product comprising reacting one or more first monomers of the formula
- wherein Y is selected from H, C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1;
- each R is independently selected from C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR1, —C1-C30alkylene-OR1, and —C1-C30alkylidene-OR1;
- R1 is selected from H, C1-C30alkyl, C6-C30aryl, substituted C6-C30aryl, and C7-C30aralkyl;
- and n is an integer selected from 0 to 7;
- with one or more second monomers of the formula Ar—CHO, where Ar is a C10-C30aromatic moiety having at least 2 fused aromatic rings, which may optionally be substituted with one or more of C1-C30alkyl, C2-C30alkenyl, C7-C30aralkyl, C6-C30aryl, substituted C6-C30aryl, —OR3, —C1-C30alkylene-OR3 and —C1-C30alkylidene-OR3;
- R3 is selected from H, C1-C30alkyl, and C6-C30aryl in the presence of an acid, and optionally in a solvent.
3 more elements
Dependencies are inferred from the claim text.