US 9,540,401 B2 · Method for producing alkyl-indium compounds and the use thereof

Abstract

The invention relates to a method for the cost-effective and environmentally friendly production of dialkyl indium chloride in high yield and with high selectivity and purity. The dialkyl indium chloride produced according to the invention is particularly suitable, also as a result of the high purity and yield, for the production, on demand, of indium-containing precursors in high yield and with high selectivity and purity. As a result of the high purity, the indium-containing precursors that can be produced are particularly suitable for metal organic chemical vapor deposition (MOCVD) or metal organic vapor phase epitaxy (MOVPE). The novel method according to the invention is characterized by the improved execution of the method, in particular a rapid process control. Owing to targeted and extensive use of raw materials that are cost-effective and have a low environmental impact, the method is also suitable for use on an industrial scale.

Claims20

Dependent claims

Process for preparing a compound (A) of the general formula:

R2InCl
comprising the reaction steps of
a1) reacting an indium donor with an alkyl donor to form the compound (A), the alkyl donor being alkylaluminium sesquichloride (R3Al2Cl3), and the indium donor being indium trichloride (InCl3),
a2) and optionally isolating compound (A) from the reaction mixture;
where R is an alkyl radical having 1 to 4 carbon atoms, and where R is branched or unbranched.

2 more elements

Dependencies are inferred from the claim text.

Method for producing alkyl-indium compounds and the use thereof

Life of this patent

Method for producing alkyl-indium compounds and the use thereof

Life of this patent

Abstract

Claims20