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US 9,540,339 B2Granted
Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsMasatoshi Echigo, Masako Yamakawa
Life of this patent
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Abstract
A resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom are described.
Claims3
A compound represented by formula (1) or formula (2):
- wherein R1 are each independently a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms;
- R2 are each independently a hydrogen atom, a halogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group and may be the same or different on the same naphthalene ring;
- at least two of R2 on at least one of the naphthalene moieties is a hydroxyl group in the formula (1);
- at least one of R2 is a hydroxyl group in the formula (2);
- n is an integer of 2 to 4;
- the structural formulas of the repeating units in the formulas (1) and (2) may be the same or different;
- in the formula (1), m1 are each independently an integer of 1 to 7;
- and
- in the formula (2), X are each independently an oxygen atom or a sulfur atom, and m2 are each independently an integer of 1 to 6.
6 more elements
The compound according to 1, wherein the formula (2) is the formula (2-2):
- wherein R1 is a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms;
- R3 are each independently a hydrogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an alkenyl group having 2 to 10 carbon atoms and may be the same or different on the same naphthalene ring;
- the structural formulas of the repeating units in the formula (2-2) may be the same or different;
- n is an integer of 2 to 4;
- and
- in the formula (2-2), m6 are each independently an integer of 0 to 5.
3 more elements
Dependencies are inferred from the claim text.