Tungsten nitrido precursors for the CVD of tungsten nitride, carbonitride, and oxide films
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsLisa McElwee-White, Timothy James Anderson, K. Randall McClain, Christopher O'Donohue
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Abstract
Embodiments of the invention are directed to a method of preparing a WNx, WNxCy, WNxOz, and WNxCyOz solid by the deposition of a WNx precursor at a temperature below 300° C. The WNx precursor is a tungsten nitrido complex. The deposition can be carried out using a tungsten nitrido complex as a single-source metal organic precursor. In an embodiment of the invention, the deposition can be performed to form a plurality of WNx, WNxCy, WNxOz, WNxCyOz nanoparticles.
Claims6
A WNx or WNxCy precursor, comprising a tungsten nitrido complex of formula:
- wherein:
- R1, R2, R3, R4, R5, and R6 are independently H, C1-C8 alkyl, C1-C8 perfluoroalkyl, C1-C8 fluorohydroalkyl, or SiR16R17R18;
- wherein R16, R17 and R18 are independently H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, or C1-C8 fluorohydroalkyl;
- and wherein at least one of R1, R2, R3, R4, R5, or R6 is not methyl.
A method of preparing a tungsten nitrido complex of the structure
- comprising:
- providing WCl6;
- mixing WCl6 with trimethylsilyl azide to form [WNCl3]4.1.1DCE (DCE=1,2-dichloroethane);
- combining the [WNCl3]4.1.1DCE with tert-butanol and a stoichiometric quantity of sodium tert-butoxide to form WN(OtBu)3;
- and
- combining the WN(OtBu)3 with one or more compounds of the formula Zr(NRaRb)4 to form (I), wherein:
- R1, R2, R3, R4, R5, R6, are independently Ra or Rb, wherein Ra or Rb are independently H, C1-C8 alkyl, C1-C8 perfluoroalkyl, C1-C8 fluorohydroalkyl, or SiR16R17R18;
- wherein R16, R17 and R18 are independently H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, or C1-C8 fluorohydroalkyl.
A method of preparing a tungsten nitrido complex of the structure
- comprising:
- providing WN(N(CH3)2)3;
- combining the WN(N(CH3)2)3 with at least one amine of the formula NHRaRb, wherein:
- R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, R12, R13, R14 and R15 are independently Ra or Rb, wherein Ra or Rb are independently H, C1-C8 alkyl, C1-C8 perfluoroalkyl, C1-C8 fluorohydroalkyl, or SiR16R17R18;
- wherein R16, R17 and R18 are independently H, C1-C8 alkyl, aryl, C1-C8 perfluoroalkyl, or C1-C8 fluorohydroalkyl, and wherein the amine of the formula NHRaRb is less volatile than NH(CH3)2;
- and
- removing NH(CH3)2 as a volatile.
Dependencies are inferred from the claim text.