System and method for a MEMS transducer
AssigneeInfineon Technologies AG
InventorsWolfgang Klein, Martin Wurzer, Stefan Barzen, Alfons Dehe
Life of this patent
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Abstract
According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a first electrode, a second electrode fixed to an anchor at a perimeter of the second electrode, and a mechanical support separate from the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode. The mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical structure and the perimeter of the second electrode.
Claims36
A microelectromechanical systems (MEMS) transducer comprising:
- a first electrode;
- a second electrode fixed to an anchor around a perimeter of the second electrode;
- and
- a mechanical support separate from, and surrounded by, the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode, wherein the mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical support and the perimeter of the second electrode.
A microelectromechanical systems (MEMS) transducer comprising:
- a backplate having a clamped portion and a released portion;
- a membrane spaced from the backplate, the membrane having a clamped portion and a released portion;
- and
- a post connected to a central region of the released portion of the backplate and a central region of the released portion of the membrane.
A method of forming a microelectromechanical systems (MEMS) transducer, the method comprising:
- forming a first perforated backplate;
- forming a structural layer;
- forming a first mechanical support in a portion of the first perforated backplate;
- and
- forming a deflectable membrane, wherein
- the deflectable membrane is fixed to the structural layer around a perimeter of the deflectable membrane,
- the deflectable membrane is spaced apart from the first perforated backplate by the structural layer and the first mechanical support,
- the first mechanical support is connected to the portion of the first perforated backplate and a portion of the deflectable membrane, and
- the first mechanical support is connected to the portion of the first perforated backplate within the perimeter of the deflectable membrane, and is encircled by the structural layer.
A microelectromechanical systems (MEMS) acoustic transducer comprising:
- a variable capacitance sensor comprising a deflectable membrane and a mechanical support coupled to the deflectable membrane;
- and
- wherein a first harmonic of the deflectable membrane produces a maximum deflection of the deflectable membrane in a first region between a perimeter of the deflectable membrane and a center of the deflectable membrane, and wherein the first region deflects more than the center of the deflectable membrane.
Dependencies are inferred from the claim text.