Composite polishing layer chemical mechanical polishing pad
AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsJulia Kozhukh, Teresa Brugarolas Brufau, Bainian Qian
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AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsJulia Kozhukh, Teresa Brugarolas Brufau, Bainian Qian
Estimating the term…
A chemical mechanical polishing pad is provided containing: a polishing layer having a polishing surface; wherein the polishing layer comprises a first continuous non-fugitive polymeric phase and a second continuous non-fugitive polymeric phase; wherein the first continuous non-fugitive polymeric phase has a plurality of interconnected periodic recesses; wherein the plurality of interconnected periodic recesses are occupied with the second continuous non-fugitive polymeric phase; wherein the first continuous non-fugitive polymeric phase has an open cell porosity of ≦6 vol %; wherein the second continuous non-fugitive polymeric phase contains an open cell porosity of ≧10 vol %; and, wherein the polishing surface is adapted for polishing a substrate.
A chemical mechanical polishing pad, comprising:
Dependencies are inferred from the claim text.