Substrate processing apparatus, and nozzle
AssigneeSCREEN Holdings Co., Ltd.
InventorHiroyuki Araki
Life of this patent
Estimating the term…
Abstract
A substrate processing apparatus includes a substrate holding unit, an injection unit that injects droplets of a processing liquid from a plurality of injection ports respectively toward a plurality of collision positions on the substrate, and a liquid film forming unit. The liquid film forming unit discharges a protective liquid from a plurality of discharge ports toward a plurality of liquid contact positions that respectively cover different collision positions. The plurality of injection ports and the plurality of discharge ports may be formed in a nozzle. A nozzle moving unit may be provided, to move the nozzle along the substrate.
Claims9
A substrate processing apparatus comprising:
- a spin chuck that holds and rotates a substrate;
- a nozzle for making droplets injected from a plurality of injection ports collide with the substrate covered by a liquid film of a protective liquid discharged from a discharge port, the nozzle including an injection portion and a discharge portion;
- a processing liquid supply pipe that supplies a processing liquid to the injection portion;
- and
- a protective liquid supply pipe that supplies the protective liquid to the discharge portion;
- a controller configured and programmed to perform a processing liquid supply control and a protective liquid supply control;
- the nozzle including
- the injection portion in which the plurality of injection ports are formed so that the droplets injected from the plurality of injection ports collide respectively with a plurality of collision positions on the substrate;
- the discharge portion in which the discharge port is formed so that the protective liquid contacts a liquid contact position on the substrate that is equal in distance from the respective collision positions;
- a supplying portion in which a processing liquid flow passageway supplying the processing liquid to the plurality of injection ports is formed;
- and
- a vibrator that is configured to sever the processing liquid supplied to the plurality of injection ports by applying vibration to the processing liquid flowing through the processing liquid flow passageway, thereby causing each of the injection ports to inject the droplets formed by the severed processing liquid;
- the controller being configured and programmed to perform the processing liquid supply control to supply the processing liquid through the processing liquid supply pipe so as to inject the droplets from the plurality of injection ports, and to perform the protective liquid supply control to supply the protective liquid through the protective liquid supply pipe so as to discharge the protective liquid from the discharge port simultaneously with the droplet injection from the injection ports.
Dependencies are inferred from the claim text.