Temperature sensing apparatus, laser processing system, and temperature measuring method

A laser processing system comprising:

• a laser source configured to emit a laser beam;
• a scanning unit configured to cause the laser beam to scan a surface;
• and
• a temperature sensing apparatus configured to measure a temperature distribution of the scanned surface, the temperature sensing apparatus comprising:
• a lens set configured to receive radiation from the scanned surface;
• a filtering module configured to divide the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths;
• a plurality of sensor arrays configured to respectively sense the radiation portions;
• and
• a processing unit configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution.

A temperature measuring method comprising:

• receiving radiation from a surface to be measured;
• filtering the radiation into a plurality of radiation portions respectively having different wavelengths;
• sensing the radiation portions to respectively obtain a plurality of intensity distributions;
• calculating an intensity ratio distribution of the radiation between the different wavelengths according to the intensity distributions;
• and
• determining a temperature distribution of the surface to be measured according to the intensity ratio distribution.