Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, compound, and method for producing compound

An acid diffusion control agent comprising a compound represented by formula (1):

• wherein in the formula (1),
• R1 represents a monovalent organic group having 1 to 30 carbon atoms;
• L represents a single bond, an oxygen atom or a sulfur atom;
• and
• M+ represents a monovalent radioactive ray-labile onium cation which is labile to a KrF excimer laser, an ArF excimer laser, an electron beam or an EUV, and
• in a case where L represents a single bond, the monovalent radioactive ray-labile onium cation represented by M+ is represented by formula (X);
• wherein in the formula (X),
• Ra represents a fluorine atom, a hydroxy group, an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 11 carbon atoms or an alkylsulfonyl group having 1 to 10 carbon atoms;
• j is an integer of 0 to 9, wherein in a case where j is no less than 2, a plurality of Ras are each identical or different;
• Rb and Rc each independently represent a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, or Rb and Rc taken together represent a ring structure having 4 to 10 ring atoms together with the sulfur atom to which Rb and Rc bond;
• and
• k is an integer of 1 or 2.

A compound represented by formula (1):

• wherein in the formula (1),
• R1 represents a monovalent organic group having 1 to 30 carbon atoms;
• L represents a single bond, an oxygen atom or a sulfur atom;
• and
• M+ represents a monovalent radioactive ray-labile onium cation which is labile to a KrF excimer laser, an ArF excimer laser, an electron beam or an EUV, and
• in a case where L represents a single bond, the monovalent radioactive ray-labile onium cation represented by M+ is represented by formula (X):
• wherein in the formula (X),
• Ra represents a fluorine atom, a hydroxy group, an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 11 carbon atoms or an alkylsulfonyl group having 1 to 10 carbon atoms;
• j is an integer of 0 to 9, wherein in a case where j is no less than 2, a plurality of Ras are each identical or different;
• Rb and Rc each independently represent a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms or a substituted or unsubstituted aryl group having 6 to 20 carbon atoms, or Rb and Rc taken together represent a ring structure having 4 to 10 ring atoms together with the sulfur atom to which Rb and Rc bond;
• and
• k is an integer of 1 or to 2.