Back to results
US 9,526,158 B1Granted
Laser-sustained plasma light source
AssigneeKLA-Tencor Corporation
InventorsIlya Bezel, Anatoly Shchemelinin, Yanming Zhao, Gildardo R. Delgado
Life of this patent
Estimating the term…
Abstract
A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
Claims20
A laser sustained plasma light source, comprising:
- a cell,
- a gas volume contained within the cell,
- at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light,
- means for continuously providing the gas volume to the plasma in a laminar flow, and
- a reflector for collecting the light and providing the light to a desired location.
2 more elements
A laser sustained plasma light source, comprising:
- a cell,
- a gas volume contained within the cell,
- at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light,
- means for continuously removing the gas volume from the plasma in a unidirectional flow,
- means for continuously providing the gas volume to the plasma in a laminar flow,
- means for cooling the gas volume that is provided to the plasma in the laminar flow and
- a reflector for collecting the light and providing the light to a desired location.
4 more elements
A laser sustained plasma light source, comprising:
- a cell,
- a gas volume contained within the cell,
- at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light,
- a hollow upper electrode disposed within the cell to receive a heated gas volume leaving the plasma, whereby the hollow upper electrode thermally shields the cell from the heated gas volume and maintains a unidirectional flow of the heated gas volume leaving the plasma,
- a hollow lower electrode disposed within the cell to provide a cooled gas volume to the plasma, whereby the hollow lower electrode maintains a laminar flow of the cooled gas volume entering the plasma, and
- a reflector for collecting the light and providing the light to a desired location.
3 more elements
Dependencies are inferred from the claim text.