US 9,525,262 B2 · Slab laser and amplifier and method of use

Abstract

A slab laser and its method of use for high power applications including the manufacture of semiconductors and deposition of diamond and/or diamond-like-carbon layers, among other materials. A lamp driven slab design with a face-to-face beam propagation scheme and an end reflection that redirects the amplified radiation back out the same input surface is utilized. A side-to-side amplifier configuration permitting very high average and peak powers having scalability is also disclosed. Cavity filters adjacent to pump lamps convert the normally unusable UV portion of the pump lamp spectrum into light in the absorption band of the slab laser, thereby increasing the overall pump efficiency. The angle of the end reflecting surface is changed to cause the exit beam to be at a different angle than the inlet beam, thereby eliminating the costly need to separate the beams external to the laser with the subsequent loss of power.

Claims26

Dependent claims

A system for transferring a material from a first object to a second object, comprising:

a laser device comprising:
a slab crystal comprising a front side, a back side, a top side, a bottom side, a left side, and a right side, wherein said back side is at least partially mirrored and wherein said slab crystal is configured to receive a seed laser beam into the front side, and also configured to emit an amplified laser beam from said front side, and
a pumping light source providing light energy to the slab crystal to amplify said seed laser beam in said slab crystal;
and
a laser routing subsystem configured to direct the amplified laser beam to vaporize a portion of the first object to deposit a part of the vaporized portion on or in the second object.

2 more elements

A system for transferring a material from a first object to a second object, comprising:

a first amplifying subsystem comprising one or more first laser devices, wherein each one of said first laser devices is comprised of a slab laser including:
a slab crystal comprising a front side, a back side, a top side, a bottom side, a left side, and a right side, wherein said slab crystal is configured to receive a first seed laser beam into the front side, and also configured to emit a first amplified laser beam from said front side,
a pumping light source providing light energy to the slab crystal to amplify said seed laser beam in said slab crystal, and
a first seed laser configured to output a first seed laser beam configured to input into said first amplifying subsystem to generate a first laser beam output;
providing a second amplifying subsystem comprising one or more second laser devices to output a second amplified laser beam;
providing a first laser routing subsystem configured to route at least a portion of said first amplified laser beam output to the first object to vaporize a portion of the first object;
and
providing a second laser routing subsystem configured to route at least a portion of said second amplified laser beam output to the second object to prepare the second object to accept at least part of the vaporized portion of the first object on or in the second object.

5 more elements

Dependencies are inferred from the claim text.

Slab laser and amplifier and method of use

Life of this patent

Slab laser and amplifier and method of use

Life of this patent

Abstract

Claims26