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US 9,523,358 B2Granted
Magnetically driven micropump
AssigneeThe Board of Trustees of the University of Illinois
InventorsFarid Amirouche, Yu Zhou, Matthew Lawrence Cantwell, Johan Citerin
Life of this patent
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Abstract
A magnetically driven micropump for handling small fluid volumes. The micropump includes a first chamber and a second chamber. A flexible membrane being disposed between the first and second chambers. The flexible membrane being magnetically coupled to an actuator for displacing the membrane.
Claims41
A micropump for delivering a fluid, the micropump comprising:
- a pump assembly including
- a first pump body defining a first fluid body flow path, the first pump body including
- a first chamber, the first chamber including a first chamber wall and a first side wall,
- a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber,
- a second pump body defining a second fluid body flow path, the second pump body including
- a second chamber, the second chamber including a second chamber wall and a second side wall,
- a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and
- a flexible membrane disposed between the first chamber and the second chamber;
- a first magnet affixed to the membrane;
- and
- an actuator assembly configured to cooperate with the pump assembly, the actuator assembly including
- a driver magnetically coupled to the membrane, where the driver comprises a magnetic coil and
- a sensor configured to detect the position of the first magnet affixed to the membrane, where the sensor is located adjacent to the magnetic coil at a location where the magnetic flux density of the magnetic coil is negligible compared to the magnetic flux density of the first magnet,
- wherein the driver applies a magnetic force to the first magnet affixed to the membrane, causing the membrane to deflect, and wherein such deflection of the membrane results in a change of pressure within the first chamber and the second chamber thereby resulting in fluid flow, and
- wherein the pump assembly is configured to direct the fluid flow in a predetermined direction without a valve.
12 more elements
A micropump assembly for delivering a fluid from a fluid reservoir, the micropump assembly comprising:
- a pump cartridge including
- a first pump body defining
- a first chamber, the first chamber including a first chamber wall and a first side wall,
- a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber,
- a second pump housing defining
- a second chamber, the second chamber including a second chamber wall and a second side wall,
- a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and
- a flexible membrane disposed between the first chamber and the second chamber,
- wherein the pump cartridge is configured to allow fluid communication from the fluid reservoir to at least one of the first chamber and the second chamber;
- and
- a housing enclosing
- an actuator assembly configured to cooperate with the micropump cartridge, the actuator assembly including
- a driver magnetically coupled to the membrane, and
- a first sensor configured to detect the position of the membrane,
- wherein the driver applies a magnetic force to the membrane, causing the membrane to deflect, and wherein such deflection of the membrane results in a change of pressure within the first chamber and the second chamber thereby resulting in fluid flow,
- a controller coupled to the driver and configured to control the position of the membrane by receiving input from the first sensor and adjusting the magnetic force applied by the driver, and
- a power supply configured to energize the driver and the controller,
- wherein the housing is configured such that the micropump cartridge may be inserted into and retained within the actuator assembly.
15 more elements
A method of fabricating a micropump, the method comprising the steps of:
- fabricating a flexible membrane from a polymer material including the steps of
- spin coating a first polymer layer on a silicon wafer and allowing the first polymer layer to cure,
- placing magnetic material on the first polymer layer,
- applying a second polymer layer around the magnetic material and allowing the second polymer layer to cure, and
- applying a third polymer layer and allowing the third polymer layer to cure;
- fabricating a rigid pump body by pouring liquid polymer material into a mold configured to form a fluid chamber, an inlet channel, and an outlet channel, and allowing the liquid polymer to cure;
- aligning the flexible membrane with the rigid pump body;
- and
- bonding the flexible polymer membrane to the rigid pump body.
6 more elements
A micropump for delivering a fluid, the micropump comprising:
- a pump assembly including
- a first pump body defining
- a first chamber, the first chamber including a first chamber wall and a first side wall,
- a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber, and
- a first flexible membrane disposed over the first chamber opposite the first chamber wall,
- a second pump body defining
- a second chamber, the second chamber including a second chamber wall and a second side wall,
- a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and
- a second flexible membrane disposed over the second chamber opposite the second chamber wall;
- at least a third pump body disposed between the first pump body and the second pump body, the third pump body defining
- a third chamber including a third side wall,
- third inlet and a third outlet, wherein the third inlet and the third outlet are in fluid communication with the third chamber,
- wherein the at least third chamber is adjacent the first membrane and the second membrane;
- and
- an actuator assembly configured to cooperate with the pump assembly, the actuator assembly including
- a driver magnetically coupled to the first membrane and the second membrane, and
- at least one sensor configured to detect the position of the first membrane and the second membrane,
- wherein the driver applies a magnetic force to the first membrane and the second membrane, causing the first membrane and the second membrane to deflect, and wherein such deflection of the first membrane and the second membrane results in a change of pressure within the first chamber, the second chamber, and the third chamber thereby resulting in fluid flow.
15 more elements
Dependencies are inferred from the claim text.