Water-soluble cutting fluid for slicing silicon ingots
AssigneeSanyo Chemical Industries, Ltd.
InventorsAki Hidaka, Yoshitaka Katsukawa, Tsuyoshi Okamoto
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AssigneeSanyo Chemical Industries, Ltd.
InventorsAki Hidaka, Yoshitaka Katsukawa, Tsuyoshi Okamoto
Estimating the term…
A water-soluble cutting fluid for slicing silicon ingots is characterized in that it includes a monoprotic or diprotic aliphatic carboxylic acid (A) having a carbon number (including the carbon in the carbonyl group) of 4˜10, and either a polyprotic organic acid (B) with ΔpKa of 0.9˜2.3 as defined by the following formula (1) or a salt (BA) of said organic acid (B) as essential components: ΔpKa=(pKa2)−(pKa1) (1) wherein the dissociation stage, at which the organic acid (B) denoted as n-protic acid HnA, becomes Hn-1A+H+ is numbered 1 with an acid dissociation constant expressed as pKa1, and the dissociation stage at which the organic acid (B) becomes Hn-2A+H+ is numbered as 2 with an acid dissociation constant expressed as pKa2.
A water-soluble cutting fluid for slicing silicon ingots characterized in comprising an azelaic acid (A), either a polyprotic organic acid (B) with ΔpKa of 0.9˜2.3 as defined by the following formula (1) or an inorganic alkali salts (BA3) of said polyprotic organic acid (B) as essential components, a compound (C), a 50 wt % potassium hydroxide aqueous solution as a pH adjusting agent (D), a naphthalene sulfonic acid formalin condensate as a dispersant (E), and a water:
Dependencies are inferred from the claim text.