# US 9,520,615 B2 · Thin film battery having improved battery performance through substrate surface treatment and method for manufacturing same

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 9,520,615 B2
- Document ID: US9520615B2
- Status: Granted
- Kind: B2
- Application number: 14/365,904
- Filed: 2012-11-02
- Published: 2014-12-04
- Granted: 2016-12-13
- Earliest claimed: 2011-12-16
- Assignees: Applied Materials, Inc.
- Applicants: Gs Energy Corporation
- Inventors: Young Jin Yoon; Jae Hwan Ko
- Web page: https://patentgrep.com/patent/US9520615B2

## CPC

- H01M 10/0562: Solid materials
- H01M 4/134: Electrodes based on metals, Si or alloys
- H01M 4/1395: of electrodes based on metals, Si or alloys
- H01M 4/366: {as layered products}
- H01M 6/40: Printed batteries {, e.g. thin film batteries}
- H01M 10/052: Li-accumulators
- H01M 10/0525: Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
- H01M 2300/0071: Oxides
- Y02E 60/10: Energy storage using batteries
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Disclosed are a thin film battery in which a negative electrode active material and a substrate side react with each other to prevent battery performance from deteriorating, and to a method for manufacturing same. The thin film battery according to the present invention has a structure in which a negative electrode active material contacts a substrate. Here, a first surface treatment layer containing the negative electrode active material and a non-reactive material are disposed on at least the portion where the negative electrode active material contacts the surface of the substrate.

## Claims

### Claim 1

A thin film battery comprising:
a substrate;
a first surface treatment layer over the substrate;
an electrolyte over the substrate;
an anode current collector over the substrate; and
an anode active material over the first surface treatment layer, the electrolyte, and the anode current collector,
wherein
the anode active material is separated from the substrate by the electrolyte, the first surface treatment layer, and the anode current collector, and
the first surface treatment layer is in contact with each of the electrolyte, the anode active material and the anode current collector.

### Claim 2 (depends on 1)

The thin film battery according to claim 1, wherein the anode active material comprises lithium (Li).

### Claim 3 (depends on 1)

The thin film battery according to claim 1, wherein the first surface treatment layer comprises a lower layer comprising an organic material and an upper layer on the lower layer and comprising an inorganic material.

### Claim 4 (depends on 3)

The thin film battery according to claim 3, wherein the inorganic material comprises at least one selected from among silicon nitride, aluminum nitride, zirconium nitride, titanium nitride, hafnium nitride, tantalum nitride, silicon oxide, aluminum oxide, zirconium oxide, magnesium oxide, titanium oxide, cerium oxide, indium oxide, tin oxide, SiON, and TiAlO.

### Claim 5 (depends on 1)

The thin film battery according to claim 1, further comprising:
a second surface treatment layer on a rear side of the substrate.

### Claim 6 (depends on 5)

The thin film battery according to claim 5, wherein the second surface treatment layer comprises at least one of CaO, MgO and CaCl2.

### Claim 7 (depends on 1)

The thin film battery according to claim 1, wherein the first surface treatment layer comprises an organic material non-reactive to the anode active material.

### Claim 8 (depends on 7)

The thin film battery according to claim 7, wherein the organic material comprises at least one of a diazo resin, an azide resin, an acrylic resin, a polyamide resin, a polyester resin, an epoxy resin, a polyether resin, an urethane resin, a polystyrene resin, an urea resin, an isocyanate resin, or a xylene resin.

### Claim 9 (depends on 1)

The thin film battery according to claim 1, wherein the anode current collector is separated from the electrolyte by the anode active material and the first surface treatment layer.

### Claim 10 (depends on 1)

The thin film battery according to claim 1, wherein a first side surface of the first surface treatment layer is adjacent to the electrolyte, a second side surface of the first surface treatment layer opposite the first side surface is adjacent to the anode collector, and a surface of the first surface treatment layer on side of the first surface treatment layer opposite the substrate is in contact with the anode active material.

### Claim 11 (depends on 1)

The thin film battery according to claim 1, wherein the anode active layer is free from direct physical contact with the substrate.

### Claim 12 (depends on 1)

The thin film battery according to claim 1, wherein the electrolyte is in direct physical contact with the substrate and the electrolyte is free from direct physical contact with the anode current collector.

### Claim 13

A thin film battery comprising:
a substrate;
a cathode current collector on one side of the substrate;
a cathode active material on the cathode current collector;
an anode current collector on the other side of the substrate and separated from the cathode current collector;
an electrolyte covering the cathode active material without overlapping with the anode current collector;
a first surface treatment layer on an exposed portion of the substrate between the electrolyte and the anode current collector; and
an anode active material on the anode current collector, the electrolyte, and the first surface treatment layer,
wherein the first surface treatment layer comprises an organic material non-reactive to the anode active material.

### Claim 14 (depends on 13)

The thin film battery according to claim 13, wherein the first surface treatment layer comprises at least one selected from among a diazo resin, an azide resin, an acrylic resin, a polyamide resin, a polyester resin, an epoxy resin, a polyether resin, an urethane resin, a polystyrene resin, an urea resin, an isocyanate resin, and a xylene resin.

### Claim 15

A method of manufacturing a thin film battery, comprising:
forming a cathode current collector on one side of a substrate;
forming a cathode active material on the cathode current collector;
forming an anode current collector on the other side of the substrate to be separated from the cathode current collector;
forming an electrolyte to cover the cathode active material without overlapping with the anode current collector;
forming a first surface treatment layer on a portion of the substrate exposed by non-overlap between the electrolyte and the anode current collector; and
forming an anode active material on the anode current collector, the first surface treatment layer, and the electrolyte,
wherein the first surface treatment layer comprises an organic material non-reactive to the anode active material.

### Claim 16 (depends on 15)

The method according to claim 15, wherein the anode active material comprises lithium (Li).

### Claim 17 (depends on 15)

The method according to claim 15, wherein the organic material comprises at least one selected from among a diazo resin, an azide resin, an acrylic resin, a polyamide resin, a polyester resin, an epoxy resin, a polyether resin, an urethane resin, a polystyrene resin, an urea resin, an isocyanate resin, and a xylene resin.

### Claim 18 (depends on 17)

The method according to claim 17, wherein forming the first surface treatment layer comprises forming a lower layer comprising the organic material and forming an upper layer comprising an inorganic material non-reactive to the anode active material on the lower layer.

### Claim 19 (depends on 17)

The method according to claim 17, wherein the inorganic material comprises at least one selected from among silicon nitride, aluminum nitride, zirconium nitride, titanium nitride, hafnium nitride, tantalum nitride, silicon oxide, aluminum oxide, zirconium oxide, magnesium oxide, titanium oxide, cerium oxide, indium oxide, tin oxide, SiON, and TiAlO.

### Claim 20 (depends on 15)

The method according to claim 15, further comprising:
forming a second surface treatment layer on a rear side of the substrate to prevent moisture-penetration through the rear side thereof.