# US 9,520,556 B2 · Semiconductor device and method of fabricating the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,520,556 B2 - Document ID: US9520556B2 - Status: Granted - Kind: B2 - Application number: 14/746,039 - Filed: 2015-06-22 - Published: 2016-02-25 - Granted: 2016-12-13 - Earliest claimed: 2014-08-21 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Hideki Horii; Jeonghee Park; Sugwoo Jung - Web page: https://patentgrep.com/patent/US9520556B2 ## CPC - H10N 70/021: {Formation of switching materials, e.g. deposition of layers} - H10B 63/30: {comprising selection components having three or more electrodes, e.g. transistors} - H10B 63/80: {Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays} - H10N 70/231: {based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect} - H10N 70/235: {between different crystalline phases, e.g. cubic and hexagonal} - H10N 70/826: {adapted for essentially vertical current flow, e.g. sandwich or pillar type devices} - H10N 70/841: {Electrodes} - H10N 70/8418: {adapted for focusing electric field or current, e.g. tip-shaped} - H10N 70/882: {Compounds of sulfur, selenium or tellurium, e.g. chalcogenides} - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H10B: ELECTRONIC MEMORY DEVICES ## Abstract Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a selection element, a lower electrode pattern provided on the selection element to include a horizontal portion and a vertical portion; and a phase-changeable pattern on the lower electrode pattern. The vertical portion may extend from the horizontal portion toward the phase-changeable pattern and have a top surface, whose area is smaller than that of a bottom surface of the phase-changeable pattern. ## Claims ### Claim 1 A semiconductor device comprising: a substrate, on which a plurality of memory cells are provided; and an insulating pattern provided on the substrate to define a feature of the memory cells, wherein each of the memory cells comprises: a selection element on the substrate; a lower electrode pattern provided on the selection element to have a horizontal portion and a vertical portion; a phase-changeable pattern on the lower electrode pattern; a protection pattern interposed between the lower electrode pattern and the insulating pattern and extended between a side surface of the phase-changeable pattern and the insulating pattern, the protection pattern being in contact with the lower electrode pattern; and a spacer pattern between the protection pattern and the side surface of the phase-changeable pattern, wherein the vertical portion is extended from the horizontal portion toward the phase-changeable pattern and has a top surface having an area smaller than that of a bottom surface of the phase-changeable pattern. ### Claim 2 (depends on 1) The device of claim 1 wherein the horizontal portion has a thickness that is substantially the same as a width of the vertical portion. ### Claim 3 (depends on 1) The device of claim 1 wherein the vertical portion has a width ranging from about 1 nm to about 10 nm. ### Claim 4 (depends on 1) The device of claim 1 wherein the insulating pattern is provided in first and second trenches crossing each other on the substrate, and the memory cells are separated from each other by the first and second trenches. ### Claim 5 (depends on 1) The device of claim 1 further comprising: word lines extending parallel to a direction, on the substrate; and bit lines extending parallel to another direction substantially orthogonal to the direction, the bit lines crossing the word lines, wherein the memory cells are provided at respective intersections of the word lines and the bit lines. ### Claim 6 (depends on 5) The device of claim 5 wherein the memory cells disposed on two adjacent ones of the word lines are provided to have bilateral symmetry with respect to a line therebetween. ### Claim 7 (depends on 5) The device of claim 5 wherein the vertical portions disposed on each of the word lines are spaced apart from each other by a substantially same distance. ### Claim 8 (depends on 5) The device of claim 5 wherein the vertical portion includes a first surface parallel to the word lines having a first length greater than a second length of a second surface parallel to the bit lines. ### Claim 9 A semiconductor device comprising: a substrate; a selection device layer on the substrate; an ohmic pattern on the selection device layer; a phase-changeable pattern on the ohmic pattern; a lower electrode pattern provided between the ohmic pattern and the phase-changeable pattern, the lower electrode pattern comprising a horizontal portion covering a portion of a top surface of the ohmic pattern and a vertical portion extending from the horizontal portion and being in contact with the phase-changeable pattern, the vertical portion exposing a bottom surface of the phase-changeable pattern at both sides thereof; a first protection pattern extending from a side surface of the lower electrode pattern to a side surface and the bottom surface of the phase-changeable pattern; and a second protection pattern extending from other side surface of the lower electrode pattern to other side surface and the bottom surface of the phase-changeable pattern, the first and second protection patterns configured for selective etching of the lower electrode pattern, wherein the bottom surface of the phase-changeable pattern on the first protection pattern is positioned at a level that is the same as or higher than that of a top surface of the vertical portion, and the bottom surface of the phase-changeable pattern on the second protection pattern is positioned at a level that is higher than the bottom surface of the phase-changeable pattern on the first protection pattern. ### Claim 10 (depends on 9) The device of claim 9 wherein the vertical portion has a width that is substantially equal to a thickness of the horizontal portion.